| 发明名称 |
LASER BEAM ANNEALING |
| 摘要 |
A laser beam diffuser for use in laser beam annealing comprises a silica laser beam guiding pipe, having a diffusing surface or layer at one end and a polished surface at the other end. The diffusing surface may be a ground surface. A bend or bends removes axial component of speckle produced by the ground surface. Adjacent the polished end the pipe may be of reduced cross section. |
| 申请公布号 |
EP0011988(B1) |
申请公布日期 |
1982.09.22 |
| 申请号 |
EP19790302664 |
申请日期 |
1979.11.22 |
| 申请人 |
NATIONAL RESEARCH DEVELOPMENT CORPORATION |
发明人 |
CULLIS, ANTHONY GEORGE;WEBBER, HUGH CHARLES;BAILEY, PAUL |
| 分类号 |
H01S3/00;B23K26/06;G02B6/00;G02B6/10;G02B6/12;G02B6/26;G02B6/42;H01L21/20;H01L21/26;H01L21/265;H01L21/268 |
主分类号 |
H01S3/00 |
| 代理机构 |
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