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发明名称
摘要
申请公布号	JPS5744748(B2)	申请公布日期	1982.09.22
申请号	JP19810119458	申请日期	1981.07.31
申请人		发明人
分类号	C09K13/06;C23F1/26;H01L21/308;H01L21/3213	主分类号	C09K13/06
代理机构		代理人
主权项
地址

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