| 摘要 |
PURPOSE:To obtain the magnetic recording medium having excellent magnetic characteristics by forming a ferromagnetic metallic thin-film layer, the principal ingredient thereof is cobalt or a cobalt alloy and which is acquired by containing cobalt nitride in the cobalt or the cobalt alloy, onto a base body. CONSTITUTION:The next devices are disposed into a bell jar 1, a side wall thereof each has a vacuum ionization gage 11 projected to the inside and a cold- cathode type ion source 9 connected to a nitrogen gas introducing pipe 10 and the bottom thereof has exhaust pipes connected to a rotary pump 2 and a diffusion pump 3. That is, a hearth 6, the side thereof has a thermoelectron source 7, is disposed to the bottom, a ferromagnetic material 8 such as cobalt is entered into the hearth, a water-cooled substrate 4, the angle of evaporation alpha thereof is made 70 deg., is mounted to an opposing upper section, and the base body 5 such as a plastic film is pasted onto the lower surface. The bell jar is formed in this manner, nitrogen gas ionized from the ion source 9 is irradiated to the base body 5 at the incidence beta of 20 deg.-90 deg., and the thin-film of cobalt containing cobalt nitride is formed onto the surface of the base body 5. |
