| 摘要 |
PURPOSE:To detect low-energy neutral particles by means of a small device by deflecting a charged particle beam according to the momentum, accelerating the deflected charged particle beam by means of an electrostatic field, and generating pulse signals with pulse-wve heights corresponding to the magnitude of the mass or kinetic energy. CONSTITUTION:A neutral particle beam 11, after being made incident upon a charge exchanging part 1 and converted into a charged particle beam 12, is deflected with a momentum analyzing magnet 7 according to the momentum of the charged particles before being discharged from the magnet 7. After that, the deflected charged particles are passed through electrodes 23 and 24, and are made incident upon a semiconductive detecting device 21. The device 21 consists of semiconductive detectors 22A-22H of a silicone surface barrier type, and produces pulse signals with pulse-wave heights corresponding to the magnitude of the mass or kinetic energy. |
