| 摘要 |
PURPOSE:To manufacture a recording medium having superior magnetic characteristics efficiently by ionizing and sending mixed gas of Ar, etc., and O2 to a base under specific conditions when forming a vacuum-deposited layer of Co or Co alloy on the base. CONSTITUTION:When a magnetic layer is formed on a base 5 by vacuum-depositing Co or Co alloy on the base 5, mixed gas of gaseous Ar or He, and gaseous O2 is ionized by a cold cathode type ion source 9 and then sent to the base 5. The gaseous Ar or He is allowed to exit in a system within a 60-60,000 mum/minute/Torr range of a deposition speed/gaseous Ar or He pressure value, and the gaseous O2 within a 6,000-6,000,000mum/minute/Torr range of a deposition speed/gaseous O2 pressure value. For example, a polyester base film 5 is set on a water-cooled base plate 4 in a vacuum deposition device, which is evacuated; and Co8 in a hearth 6 is heated to vapor, thus performing vacuum deposition under said conditions. |
