| 摘要 |
PURPOSE:To automate the inspection of a semiconductor substrate by a method wherein a driving motor is directly linked to the first gear having the small number of teeth, a semiconductor mounting table is directly linked to the second gear having the large number of teeth, a one time rotation detector is arranged at the neighborhood of the first gear, and the motor is controlled to indicate the direction of the substrate. CONSTITUTION:When rotational motion in the direction A is applied to the motor 3 in condition that the semiconductor substrate 1 performed with positioning of orientation flat (OF) in the prescribed direction is put on the mounting table 2, the first gear 4 rotates in the same direction, and the substrate 1 rotates in the opposite direction by rotation of the second gear 5. Motion thereof is controlled by a coincidence signal of a rotating plate 6 directly linked to the first gear, a one time rotation signal of the detector 7, and an indication of rotation indicated previously from the controlling part. Accordingly various kinds step control are enabled only by changing the ratio of gear enabling automation of the inspection. |
