| 摘要 |
In a process and apparatus for electrodeposition, particularly suitable for the electroplating of a substrate (1) having a large surface area and a complicated profile, an electrode (2) having a small electrode surface area (2a) is used, which is to face a part of the substrate (1) with an electrodeposition gap (G) washed with electrolyte fluid. Small high-frequency mechanical vibrations act on the electrode (2), while a preferably pulsed electrodeposition current flows between the electrode (2) and the workpiece (1), which are displaced relative to one another so that the electrode surface (2a) three-dimensionally sweeps a selected substrate zone, whereby an electrodeposited layer of the desired uniform thickness is formed at an increased rate. The electrode (2) is preferably formed in an electrode arrangement (3) which comprises an electromechanical transducer (4), a flare (6) and the electrode (2) in that order. Driving units (12, 13, 14) react to a numerical control instrument (15) for the purpose of a three-dimensional relative displacement between the electrode arrangement (3) and the substrate (1). An automatic electrode-changing unit (17, 18, 19) is connected to the control instrument (15), so that different electrodes (102, 202, 302) can be introduced one after the other into electrodeposition positions for successive substrate zones. <IMAGE>
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