| 摘要 |
PURPOSE:To stop two-dimensional motion, and to obtain the tester having high performance by mounting an electromagnet directly or indirectly to a base for a test on which the semiconductor substrate is placed. CONSTITUTION:The measuring pad 2a of the semiconductor substrate 2 on the testing base 1 is conformed to the point 3a of a measuring needle 3 fixed in the x and y directions by operating a handle 5 directly coupled with a sliding base 4. After the relative positions in the x and y directions of the pad 2a and the point 3a of the needle agree, the needle 3 is operated in the z direction, its operation is stopped at the time when the point 3a contacts with the pad 2a, and the needle is fixed. The electromagnet 6 incorporated into the handle 5 is conducted under this condition, and the testing base is adsorbed. A slat 7 is made of a ferromagnetic material. According to this constitution, the tester is extremely proper to a test of which the measuring needle must be contacted with the pad for a fixed time because the fixing or non-fixing of the testing base can be conducted through the on-off control of the electromagnet. |
