MEASURING METHOD FOR TEMPERATURE DISTRIBUTION

摘要

PURPOSE:To make the accurate measurement of temp. distributions possible by making the reflectivity/emissivity map of the respective points on a sample surface and correcting the actual measured values of temp. CONSTITUTION:The emissivity map of the surface of a sample 1 is made with a CPU11 in accordance with the differences in the signals obtained by detecting 3 the IR rays from the surface of said sample 1 in the state of irradiating the reference IR ray from a reference black body furnace 8 and in the state of not irradiating the same, respectively. The IR rays from the surface of the sample put in the measurement state are detected in the state of not irradiating the reference IR rays and the obtained detection signals are corrected in accordance with the emissivity map. In accordance with the corrected signals, the image of the temp. distributions of the sample surface is displayed 14.