| 摘要 |
PURPOSE:To improve the detection precision of a line pattern and to simplify a circuit by exclusively ORing the stored information of a storage circuit for the binary-coded signal of a circuit pattern and that of another storage circuit for large pattern information removed from the line pattern. CONSTITUTION:The circuit pattern surface of a sample 1 to be inspected is picked up by a television camera 2, whose video signal is converted into a time series binary signal by a binary-coding circuit 3. The signal is read in the 1st storage circuit 4 and the 2nd storage circuit 5, and the information of the 1st storage circuit is processed by a line-pattern removing circuit 6 and then stored in the 2nd storage circuit 5 while removed from its line pattern. The outputs of the 1st and 2nd storage circuits are synchronized with each other and exclusively ORed by an element 7, and only line pattern information is read in the 3rd storage circuit 8 and sent to a propriety detecting circuit 9. Thus, the detection precision of the line pattern is improved and the circuit is simplified. |
