| 摘要 |
The first and the second circulation pipe systems are respectively and circularly connected to a tray which a processing solution is supplied into, respective pumps to pump up the processing solution, respective containers which a circulated processing solution is retrieved into, and an over-flow unit to keep the level of a processing solution supplied into the tray at desired level, the over-flow unit being provided to the opening of the bottom of the tray. In the respective circulation pipe systems, valves for switching over between the systems are further provided, alternatively to circulate a desired processing solution by controlling the valves.
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