| 摘要 |
PURPOSE:To simplify the forming process of the diaphragm, by forming a coating layer of a magnesium-lithium alloy on the surface of a base body which is formed into a dome type diaphragm from a prescribed metal and by exfoliating the coating layer and making the required thickness approximately uniform. CONSTITUTION:A base body 2 is formed from glass, quarts, a silicon compound, a ceramic, or a metal, such as tungsten, molybdenum, tantalum, etc., and the base body 2 is placed in vacuum deposition equipment. Then, a coating layer 1 of a magnesium-lithium alloy is formed on the surface of the base body 2 by a vacuum deposition method. Then the coating layer 1 is gradually cooled to the temperature of the base body 2 and the deposited coating layer 1 of the magnesium-lithium alloy is completely exfoliated from the base body 2, and thus, the required thickness of the diaphragm is made almost uniformly. Thus the forming process of the diaphragm is simplified. |
