| 摘要 |
PURPOSE:To measure the straightness of holes, grooves, and the like by a simple constitution highly accurately, based on an interference measuring method utilizing laser light, by detecting the change in inclination of a reflecting mirror provided in a slider that is intimately contacted with the inner wall of a circular pipe and moved, based on the amount of the shift from the center of an interference ring on a projection screen. CONSTITUTION:The laser light 3 emitted from an He-Ne laser 7 is focussed on a central pinhole of the screen 5 by a condenser lens 4. Then the light is inputted to a semitransparent mirror 1 fixed to one end of a material to be measured 10 and to the reflecting mirror 2, which is fixed to the slider 11 that can be smoothly moved along the internal diameter of the material to be measured 10, through reflecting mirrors 8 and 9. The reflected light beams from the semitransparent mirror 1 and the reflected mirror 2 go back to the screen 5 and generate the interference ring. From the amount of shifting of the interference ring caused by the movement of the slider 11, the straightness of the hole (or groove and the like) is measured by the simple constitution highly accurately. |
