| 摘要 |
PURPOSE:To measure the surface positions of the surface to be measured highly accurately, by detecting the displacement caused in the direction perpendicular to the axial line at the tip of a measuring probe when an external force is applied on the spherical contact surface of the tip of the measuring probe, and turning a measuring head so as to cancel the displacement. CONSTITUTION:When operating handles of manual pulse generators 37 and 38 are rotated, the head 13 is moved along the X axis and the Y axis in response to the amount of their rotations by the command of a computer 36, and the head is positioned. When switch SW is depressed, the computer 36 moves the head so that the output of a displacement detector 23 becomes zero. The slant direction of the surface to be measured Wa is detected based on which of displacement detectors 28 and 29 outputs the signal. The axial line of the measuring head is turned by a servomotor 15 so that the output of the detector becomes zero. The coordinates of the central position of the rotation of the axial line and the turning angle are detected from the counted values of position detecting counters 50-52, and the surface positions of the surface to be measured Wa are computed. Thus the surface positions of the surface to be measured are measured highly accurately. |
