PREPARATION OF ULTRA-THIN FILM

摘要

PURPOSE:To prepare an ultra-thin film soluble in organic solvents, by the plasma polymerization of a compound obtained by substituting a part of the hydrogen atoms of a lower saturated hydrocarbon with Cl and F, on the surface of a substrate. CONSTITUTION:A monomer gas composed of a compound obtained by substituting a part of the hydrogen atoms of a lower saturated hydrocarbon (e.g. methane) with chlorine atom and fluorine atom (e.g. CHCl2F) is subjected to the plsama polymerization on the surface of a substrate material (e.g. made of polyethylene, etc.). The polymerization can be carried out at room temperature. The monomer gas may contain a polymerizable vinyl monomer preferably in an amount of <=40mol%. USE:Resist for electron rays.