FORMATION OF PROTECTIVE FILM

摘要

PURPOSE:To enhance the corrosion and wear resistances of a substrate by depositing a target made of olefin polymer on the surface of the substrate by sputtering in a mixed atmosphere of a reducing gas and an inert gas. CONSTITUTION:An olefin polymer is molded into a film or formed as a coat on an Al plate and used as a target. The target is evaporated by ion bombardment in a mixed atmosphere of a reducing gas and an inert gas, and the vapor is deposited on the surface of a substrate to be protected such as a metallic thin film type magnetic recording medium to form a protective film having <= about 1,000Angstrom thickness. By this protective film the corrosion resistance of the metallic thin film and the wear resistance to a magnetic head are enhanced remarkably. In the formation of a protective film on a metallic thin film type magnetic recording medium using a plastic film as the substrate, a magnetron type RF sputtering method is optimum.