发明名称 |
FORMATION OF PROTECTIVE FILM |
摘要 |
PURPOSE:To form a protective film with superior corrosion and wear resistances by depositing a target made of thermoplastic aromatic polyester on the surface of a substrate by sputtering in a mixed atmosphere of a reducing gas and an inert gas. CONSTITUTION:Thermoplastic aromatic polyester is molded into a film or formed as a coat on an Al plate and used as a target. The target is evaporated by ion bombardment in a mixed atmosphere of a reducing gas and an inert gas, and the vapor is deposited on the surface of a substrate to be protected such as a metallic thin film type magnetic recording medium to form a protective film having <= about 1,000Angstrom thickness. In the formation of a protective film on a metallic thin film type magnetic recording medium using a plastic film as the substrate, a magnetron type RF sputtering method is optimum. |
申请公布号 |
JPS57145978(A) |
申请公布日期 |
1982.09.09 |
申请号 |
JP19810031840 |
申请日期 |
1981.03.04 |
申请人 |
MATSUSHITA DENKI SANGYO KK |
发明人 |
HIBINO KUNIO;SUZUKI TAKASHI;KUNIEDA TOSHIAKI |
分类号 |
G11B5/72;C23C14/06;C23C14/12;G11B5/64;H01L21/312 |
主分类号 |
G11B5/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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