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发明名称
INTEGRIERTE HALBLEITERSCHALTUNG UND VERFAHREN ZU IHRER HERSTELLUNG
摘要
申请公布号
DE3146779(A1)
申请公布日期
1982.09.09
申请号
DE19813146779
申请日期
1981.11.25
申请人
HITACHI,LTD.
发明人
MURAMATSU,AKIRA
分类号
H01L21/8226;H01L21/331;H01L21/762;H01L21/8228;H01L27/02;H01L27/082;H01L29/73;(IPC1-7):H01L27/04;H01L21/72
主分类号
H01L21/8226
代理机构
代理人
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地址
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