| 摘要 |
PURPOSE:To stabilize the fluidized state and improve the efficiency in depositing silicon of high purity from chlorosilane by the fluidizing method, by feeding a fluidizing deriving gas in portions divided in the height direction of a fluidized bed. CONSTITUTION:Seeds of fine silicon particles are fed from a seed particle introductory port 2 at the top of a fluidized bed reactor 1 and retained in the interior of the reactor 1. A chlorosilane gas is introduced from gas introductory ports 3, 4 and 5 for a fluidizing driving gas divided in many stages in the height direction of the reactor 1 to keep the fluidized state stable. Thus, the reaction proceeds fully to improve the conversion efficiency of the chlorosilane into the silicon. |
