| 摘要 |
PURPOSE:To improve the productivity of an oxygen concn. detecting element by forming plural pieces of oxygen concn. detecting parts on one sheet of substrate, parting these then laminating these discretely on substrates buried with heating elements. CONSTITUTION:Heating elements 15 are printed and laminated on a substrate blank material 11a, and a substrate blank material 11b is laminated by pressure on this, whereby a substrate 11 is manufactured. Oxygen concn. detecting parts 23 are formed by first forming plural pieces of reference electrodes 12 on a substrate 17 by a PVD method such as vacuum vapor deposition or sputtering, then forming oxygen ion conductive solid electrolytes 13, measuring electrodes 14 and protection layers 16 successively on the reference electrodes 12 by a PVD method using a metallic mask of a prescribed shape. Plural pieces of the parts 23 on the substrate 17 are divided and cut after this and are manufactured to the individual parts 23. The substrate 11 and the part 23 manufactured in this way are adhered by means of adhesives 18, whereby an oxygen concn. detecting element 10 is obtained. |
