| 摘要 |
PURPOSE:To easily measure a position and density distribution of a beam to a target chamber, by installing a beam measuring device at a position where the target chamber is inserted. CONSTITUTION:When a band-like beam accelerated by an accelerating chamber is made incident in the direction as indicated with an arrow B, it is hit against each electrode 8a-8e and is caught, and the quantity of the beam caught by a current detector is detected and measured as a current value respectively. For instance, if a current value measured by the lower electrode 8e is smaller than a prescribed value, the beam proves to be biased upward. In this way, a position of a beam and its density distribution can be measured by magnitude of a current value measured from each electrode 8a-8e. |
