| 摘要 |
PURPOSE:To obtain a movable table device wherein a single table is moved in X, Y and theta directions by connecting the table to a fixed frame through three links. CONSTITUTION:The first link 4 pivotably supported on the fixed frame 2 side and the second link 5 pivotable supported on the table 1 side are connected to each other at four places in such a manner that they can be moved freely in directions in one plane, the connection being made by an auxiliary link mechanism 3 so connected as to be free from chattering in vertical directions. The three links connecting the table 1 with the frame 2 are capable of freely extending and contracting through the adjustment of the screwing-in length of a threaded rod 8 by driving a motor 10. By driving the motor 10, the table 1 is moved in the X, Y and theta directions in the plane determined by the auxiliary link mechanism 3. Positioning is carried out by an encoder 11. |
