发明名称 WIRE BONDER WITH TENSION STRENGTH CHECKER
摘要 PURPOSE:To enable all the bonded spots to be checked, by creating slipping resistance on a bonding wire. CONSTITUTION:A checker consists of a brake actuator for a brake shoe 21, a structure to give pushing strength by a weight 23, and a structure to adjust pushing strength. It is mounted to an arm 6 united to a capillary 4 via a horn 3. It moves to an arrow a direction at the same time when the capillary 4 leaves from a pellet 11 after bonding. At the same time, the very spot is checked for bonding strength. If qualified, it moves to a bonding process of next bonding pad 13 and checks the next spot for bonding strength.
申请公布号 JPS57143834(A) 申请公布日期 1982.09.06
申请号 JP19810027647 申请日期 1981.02.28
申请人 TOKYO SHIBAURA DENKI KK 发明人 SONE SADAYUKI;NIITOME MASAKAZU
分类号 H01L21/66;H01L21/60 主分类号 H01L21/66
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