| 摘要 |
<p>PURPOSE:To prevent the production of strain due to heat, by a method wherein only an electric exposing surface of a conductor for drawing an electric signal from a pressure detecting element to the outside is covered with an insulating sheath covered by an electrophoresis method. CONSTITUTION:A sensor consists of a diaphragm 1, a strain gauge element 2, an electrode 3, a wire for connecting together the electrode 3 and a bonding post 5, a plinth 6 for supporting the diaphragm 1, a stand 7 for relieving thermal strain, and a header 8 for supporting the stand 7 and the bonding post 5. A thin insulating film 11 for protecting a PN junction is formed. An insulating cover 9, covering only the surface of the electrode 3, the wire 4, and the bonding post 5 by an electrophoresis method, is formed with, for example, acryl resin, epoxy resin, polymid resin. This prevents the occurrence of a change in output and electrolytic corrosion due to leak current by a conductive material in a medium to be measured, and the occurrence of a change in output due to thermal strain and change with the lapse of time.</p> |
