| 摘要 |
PURPOSE:To enhance the sticking strength of a protective film without deteriorating the light transmitting characteristics by roughening the surface of an org. material formed on a color filter or the like by reactive dry etching and by coating the roughened surface with the protective film for the org. material. CONSTITUTION:A color mosaic filter is formed on an optical glass substrate and coated with resin or the like for preventing deterioration. The surface of the org. material is removed by a fixed quantity by reactive dry etching such as sputtering or plasma treatment to form a large number of protrusions each having 3-4nm height and about several 100Angstrom width. An ultraviolet curing type resin such as thiol-ene resin is then applied to the roughened surface and cured to form a protective film. By this method the sticking strength of the protective film is enhanced, and since the film is not peeled off even during ultrasonic washing, it shows the protective effect sufficiently. |
