摘要 |
The invention relates to a differential pressure measuring device having a measuring diaphragm to which pressure can be applied and which subdivides a measuring chamber into two measuring spaces. The measuring diaphragm consists of a carrier diaphragm and of a semiconductor sensor which outputs an electric variable which is proportional to the differential pressure. In order to prevent mechanical overstressing of the semiconductor sensor (7) in conjunction with a large measuring range of the differential pressure measuring device, provision is made for a compensation device (8) which is coupled mechanically to the semiconductor sensor (7) and is controlled by the electric variable in such a way that the semiconductor sensor (7) is pressed back into its initial position. The actuating signal for controlling the compensation device (8) represents the output variable of the differential pressure measuring device. The invention can be applied chiefly in pressure measuring transformers. <IMAGE>
|