发明名称 Differential pressure measuring device
摘要 The invention relates to a differential pressure measuring device having a measuring diaphragm to which pressure can be applied and which subdivides a measuring chamber into two measuring spaces. The measuring diaphragm consists of a carrier diaphragm and of a semiconductor sensor which outputs an electric variable which is proportional to the differential pressure. In order to prevent mechanical overstressing of the semiconductor sensor (7) in conjunction with a large measuring range of the differential pressure measuring device, provision is made for a compensation device (8) which is coupled mechanically to the semiconductor sensor (7) and is controlled by the electric variable in such a way that the semiconductor sensor (7) is pressed back into its initial position. The actuating signal for controlling the compensation device (8) represents the output variable of the differential pressure measuring device. The invention can be applied chiefly in pressure measuring transformers. <IMAGE>
申请公布号 DE3106835(A1) 申请公布日期 1982.09.02
申请号 DE19813106835 申请日期 1981.02.17
申请人 SIEMENS AG 发明人 SCHULZ,WINFRIED,DR.
分类号 G01L13/06;G01L9/00;G01L11/00;G01L13/02;G01L19/06;(IPC1-7):01L13/00;01L9/06 主分类号 G01L13/06
代理机构 代理人
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