发明名称 |
OPTICAL ALIGNING SYSTEM FOR TWO PATTERNS AND PHOTOREPEATER MAKING USE OF SUCH A SYSTEM |
摘要 |
An optical system for aligning two patterns particularly by photo-repetition in which a first pattern formed by two optical networks, disposed along two coordinate axes is illuminated by the image of a second pattern comprising two optical networks, forming a reference produced from the orders of diffraction. In a variation, the optical networks are formed from a series of parallel strokes whose thickness and spatial distribution in a first direction parallel to one of the coordinate axes are determined by a pseudo-random code; the strokes of the optical networks of the first pattern being furthermore interrupted periodically in a second direction orthogonal to the first direction so as to form an optical network with a constant pitch in this direction. The optical alignment system comprises means for detecting the intensity of a predetermined part of the orders of diffraction in the second direction. |
申请公布号 |
DE3060657(D1) |
申请公布日期 |
1982.09.02 |
申请号 |
DE19803060657 |
申请日期 |
1980.01.23 |
申请人 |
THOMSON-CSF |
发明人 |
LACOMBAT, MICHEL;DUBROEUCQ, GEORGES |
分类号 |
H01L21/30;G01B11/00;G02B27/42;G03F9/00;H01L21/027;(IPC1-7):G03B41/00;G05D3/00 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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