| 摘要 |
PURPOSE:To obtain a magnetic recording medium superior in resistance to corrosion, oxidation, and wear, by forming a nitride thin film of Al or the like on the surface of a ferromagnetic metallic layer in a vacuum chamber at <=8X10<-4> Torr and a partial pressure of N2 or NH3 of 1X10<-5> Torr by the electron impact method. CONSTITUTION:The pressure in a vacuum tank 1 is reduced to <=8X10<-4> Torr, and the partial pressure of gaseous N2 or NH3 is set to >=1X10<-5> Torr, and one or more kinds of element selected from Al, Si, Ti, Zr, Hf, V, Nb, Ta, Th, and Cr are vaporized from an vaporization source 3 by heating and are ionized by an ionizing part 4, and gaseous N2 or NH3 is accelerated by an accelerating electrode 5 to form a metallic nitride thin layer on a ferromagnetic metallic layer which is formed preliminarily on the surface of a base material 8, thus obtaining a magnetic recording medium. A magnetic layer is protected by the nitride layer with 5-2,000Angstrom thickness nor oxidized and is not corroded by the dirt of fingers or the like, and the resistance to wear is improved, and the life of this magnetic recording medium is extended without the degradation of the magnetic characteristic. |
