发明名称 |
Dual probe interferometer for object profile measuring |
摘要 |
An apparatus is described for accurately measuring the profile on an object. The apparatus comprises two probes for simultaneously scanning the object to be measured and the reference object, the objects being rotatable about the same axis. Each of the probes is provided with a reflecting element, which are respectively incorporated in the measuring arm and reference arm of an interferometer.
|
申请公布号 |
US4347441(A) |
申请公布日期 |
1982.08.31 |
申请号 |
US19800193972 |
申请日期 |
1980.10.06 |
申请人 |
U.S. PHILIPS CORPORATION |
发明人 |
DIL, JAN G.;DRIESSEN, JOHANNES C.;MESMAN, WICHERT |
分类号 |
G01B9/02;G01B11/24;G01B11/30;G01B21/20;(IPC1-7):G01N21/86 |
主分类号 |
G01B9/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|