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发明名称
DIRECT-ACTING STAGE
摘要
申请公布号
JPS63138292(A)
申请公布日期
1988.06.10
申请号
JP19860284287
申请日期
1986.12.01
申请人
CANON INC
发明人
FURUKAWA KANAME;HIGOMURA MAKOTO;OTSUKA MASARU
分类号
G12B5/00;B23Q1/00;B23Q1/58;B23Q1/72;G03F7/20;H01L21/68
主分类号
G12B5/00
代理机构
代理人
主权项
地址
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