| 摘要 |
PURPOSE:To eliminate the need for adjusting a focus in an automatic device by adjusting the focus to either or the middle of a pellet having difference in stages and a lead in the same optical system, imaging both positioning marks, changing an indistinct image into binary system and detecting the position. CONSTITUTION:A camera such as a TV camera 1 with the optical system 2 is driven in the X and Y directions, and matching marks formed to the leads 7 of a package 3 and the pellet 6 are imaged. The signals are picture-processed, the positions of the marks are detected, a stage 5 is driven by a controller 10, and automatic bonding is conducted. The picture processor 4 is given a function which changes the signals into binary system and processes them, and the position of the focus at the time of imaging is used as the position of the focus of parts such as the leads 7. In this case, an obscure image is obtained due to difference in stages at the pellet side, but the locations of the marks can be detected at accuracy within the allowable range of bonding by setting the image at a proper level and changing the picture signals into binary. Accordingly, automatic bonding is enabled without forming a focus adjusting function to the the optical system because the information of a reference position is acquired. |
