LEAKAGE DETECTOR

摘要

PURPOSE:To perform leakage tests of products to be teated automatically and efficiently by containing the products to be tested which are conveyed by a carrier into a sealed test space and subjecting the same to the leakage test. CONSTITUTION:Plural pieces of semiconductor products 10 which are subjected to the force feeding operation of gaseous helium are pitch-fed by each pitch in an arrow A direction by means of pitch feed holes 30 while they are kept held in the holding holes 26 of a carrier 14. These products are conveyed successively by each piece into a test vessel 12. The products 10 conveyed into the vessel 12 are contained in the sealed test space formed of the sealing rubber ring 18 of the vessel 12 and the sealing rubber ring 20 of a sealing cover 16. If a leakage defect exists in any product 10, gaseous helium leaks into the sealed test space and therefore this leaking gas is conducted through a conduit 22 into the body part of the tester, whereby the presence or absence of the leakage is detected. Since no direct force is exerted upon the products 10, the generation of the deformation defects of the products 10 is obviated.