LEAKAGE DETECTOR

摘要

PURPOSE:To perform leakage detection of good accuracy automatically by detecting the acoustic emission generated by the fluid leaking from products to be examined. CONSTITUTION:A semiconductor product 10 is kept sunk in the liquid 14 in a detecting vessel 12. The liquid 14 is high temp. liquid to accelerate the generation of foam from the product 10. A heater, and a temp. controller are built in a control part 12A in the lower part. A sensor 18 for detecting the acoustic emission generated by the foam 16 produced in the liquid 14 from the cavities in the product 10 is fitted on the outside wall surface in the upper part of the vessel 12. When the foam 16 leaks from the cavities in the product 10, the acoustic emission generated by the foam 16 is surely detected by the sensor 18, and is measured and displayed by a measuring device 20.