A PLASMA PROCESSING CHAMBER,申请号GB19820001783-传众专利搜索

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发明名称	A PLASMA PROCESSING CHAMBER
摘要
申请公布号	GB2093266(A)	申请公布日期	1982.08.25
申请号	GB19820001783	申请日期	1982.01.22
申请人	LAM REESEARCH CORP	发明人
分类号	B01J19/08;H01J37/16;H01J37/32;H01L21/205;H01L21/302;(IPC1-7):H01J37/00	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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