| 摘要 |
PURPOSE:To perform the recovery and effective use of a vapor depositing material by sticking the vapor flow scattering in unnecessary directions on the wall formed of the same material as the vapor depositing material and utilizing the stuck matter together with the wall material as a vapor depositing material. CONSTITUTION:Plural pieces of blocks 2a, 2b, 2c, etc. of the size at which they can be put in a hearth or crucible are assembled by using a protecting case 3 around a vapor source 1 disposed with a vapor depositing material 1a, to form a wall 2 for recovery, so that the vapor flow directing in unnecessary directions is received by said wall. The wall 2 consists of the same material as the vapor depositing material. After the end of vapor deposition, the wall 2 is disassembled to the blocks 2a, 2b, etc., and the blocks held stuck with the vapor depositing material on the surface are put into the hearth or crucible, and are used as a vapor depositing material. It is also possible to constitute the entire part of the wall for recovery of one piece of plate-like member of the vapor depositing material, to cut this after the end of the vapor deposition and to use the same as a vapor depositing material. By the use of such wall for recovery, the vapor depositing material attaining about 50% is recovered. |
