| 摘要 |
PURPOSE:To make the evaporation temp. uniform and to prevent the reevaporation of a vapor depositing material and the evaporation of impurities by circulating a heating medium having a controlled temp. through a vapor depositing boat to heat and melt the depositing material. CONSTITUTION:A vapor depositing vessel 5 is evacuated by exhausing air in the direction of an arrow 12, a support 6 of Al or the like is fixed in the vessel 5 with a fixing member 8 together with a heater 7, and a vapor depositing boat 9 made of stainless steel or the like is set at a prescribed position of the vessel 5. A heating medium having a controlled temp. such as silicon oil is circulated through the boat 9 from an arrow 10 to an arrow 11, and the boat 9 is packed with a vapor depositing material such as Se. The internal temp. of the boat 9 is monitored with thermocouples A-I set in the boat 9. The material reaches the evaporation temp. in a short time. No temp. difference is produced in the longitudinal direction of the boat 9, and uniform evaporation is carried out until vapor deposition is finished. |
