| 摘要 |
PURPOSE:To make capable of automatic operations such as removal, rotation, and transfer of a disc by providing a movable sealed chamber for containing a motor to rotate the disc on which wefers are mountd in an ion implantation chamber. CONSTITUTION:A lock chamber 7 the internal pressure of which is optionally changed between vacuum and atmospheric pressure is provided on the side of a vacuum ion implantation chamber 1 through a gate valve 9, and a disc 3 on which wefers are mounted is moved between both chambers using a carriage. A sealed chamber, which contains a motor 32 to rotate the disc 3 and which is movable reciprocatingly on a rail 18, is provided in the implantation chamber 1, on the top of it a rotating shaft 17 provided with an engaging device for engaging removably with the disc 3 is provided removably, and the sealed chamber is lined air-tightly to the external of the implantation chamber 1. Thus dust from the motor 32 can be prevented to infiltrate, and various operations of the disc 3 can be automated easily. |
