| 摘要 |
PURPOSE:To measure dimensions and an area exactly, by magnifying and forming an image of a substance to be inspected, on a photosensor consisting of a lot of photodetecting elements, through a semitransparent mirror placed on an optical path passing through an eyepiece from an objective lens of a microscope. CONSTITUTION:A stage 1 is exactly positioned against a photosensor F by placing a gauge in advance on the stage 1 of a microscope so that a formed image of the gauge coincides with a reference line 20 on a screen 2. A substance to be inspected is placed on the stage 1, an image enlarged to a prescribed magnification through an objective lens 3, a semitransparent mirror 60, and a lens 6 is formed on the photosensor F consisting of a lot of photodetecting elements, and by its output signal, the substance to be inspected is measured. In this way, di?mensions and area are measured exactly. |
