| 摘要 |
PURPOSE:To decrease positioning difference by picking up by a TV camera a stage position on the side higher than a bonding position and, after roughly detecting position difference, by a highly magnified image pick up at the bonding position based on the detected information. CONSTITUTION:The position of the first pellet 1 on a frame 2 is roughly detected on a position detector stage and this information is put in the memory. The pellet is moved by one pitch and when it is in a bonding position the pick up area of a camera 10 is adjusted at the specific electrode position by central controlling circuit 3 based on the position detector information. It is also adjusted to other electrode position at a high speed. By this method increase of magnification of the camera 10 does not cause the camera to slip out of the pick up area since the pick up area is roughly adjusted by the information detected by the position detector stage, thereby making possible a highly accurate bonding. |
