| 摘要 |
PURPOSE:To improve the sensitivity and make manufacturing process easier by a method wherein transparent organic substance layers are formed on the sensing parts of a solid-state image pickup tube and light-shielding layers are selectively formed on the specified position of the surface of the organic substance layers. CONSTITUTION:An SiO2 layer 11 is formed on an N type Si substrate 10 which has N<+> channel-stopper. Regions 1 are made sensing parts by providing transfer electrode 13 to certain parts in the SiO2 layer 11 and a transparent electrode 12a of the material such as SnO2 or In2O3 is formed on the whole surface. Then, after layers 16 of transparent organic substance such as polyimide are formed over the sensing parts, an Al layer is formed on the whole surface and light- shielding layers 15a are formed by etching and a color filter 17 is formed on the layers 15a. With this constitution, manufacture is made easier and the sensitivity of the solid-state image pickup device is improved. |
