Device for analysing the surface of a sample

摘要

A device for determining the chemical composition of the surface of a sample (2) with the aid of at least two surface analysis methods which incorporates devices (3, 7) for exciting and/or bombarding the sample and at least two analysers (12, 14) for examining the energy and/or mass of secondary particles, is equipped with a deflector (41) for deflecting the secondary particles originating from the sample in the direction of the desired analyser or analysers. <IMAGE>