发明名称 Solid-state image pickup element and process for fabricating the same
摘要 A highly sensitive and high-density picture element solid-state image pickup element and a process for fabricating the same which is featured in (a) that in the step for patterning a photoconductive layer, a protective pattern resisting an etchant is formed by using an ultraviolet-ray-setting resin which is also used in the step for bonding a color filter and then the undesired areas of the photoconductive layer, which has been formed over the whole surface of a wafer, are removed and (b) that the color filter having a stripe or mosaic pattern is bonded to the protective pattern with the same ultraviolet-ray-setting resin. Alternatively, after the color filter has been bonded, the undesired areas of the photoconductive layer are removed with the color filter used as an etching mask.
申请公布号 US4345021(A) 申请公布日期 1982.08.17
申请号 US19800188580 申请日期 1980.09.18
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 OGAWA, KAZUFUMI;CHIKAMURA, TAKAO;SHIBATA, TAKUO
分类号 G03F7/00;H01L27/146;(IPC1-7):G03C5/00 主分类号 G03F7/00
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