发明名称 |
Solid-state image pickup element and process for fabricating the same |
摘要 |
A highly sensitive and high-density picture element solid-state image pickup element and a process for fabricating the same which is featured in (a) that in the step for patterning a photoconductive layer, a protective pattern resisting an etchant is formed by using an ultraviolet-ray-setting resin which is also used in the step for bonding a color filter and then the undesired areas of the photoconductive layer, which has been formed over the whole surface of a wafer, are removed and (b) that the color filter having a stripe or mosaic pattern is bonded to the protective pattern with the same ultraviolet-ray-setting resin. Alternatively, after the color filter has been bonded, the undesired areas of the photoconductive layer are removed with the color filter used as an etching mask.
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申请公布号 |
US4345021(A) |
申请公布日期 |
1982.08.17 |
申请号 |
US19800188580 |
申请日期 |
1980.09.18 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
OGAWA, KAZUFUMI;CHIKAMURA, TAKAO;SHIBATA, TAKUO |
分类号 |
G03F7/00;H01L27/146;(IPC1-7):G03C5/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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