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发明名称
GAS ION SOURCE
摘要
申请公布号
JPS57132654(A)
申请公布日期
1982.08.17
申请号
JP19810194648
申请日期
1981.12.04
申请人
DEYUBIRIE SAIENTEIFUITSUKU LTD
发明人
NEIRU AASAA PAASHIYUREI
分类号
H01J37/08;B01J19/08;H01J27/16;H01J27/20;H01J49/10
主分类号
H01J37/08
代理机构
代理人
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