Method and arrangement for producing a constrained controlled movement of a plasma generator in conjunction with its mounting and dismounting in a plasma processing layout

摘要

The present invention involves a method and an arrangement for producing a constrained controlled motion of a plasma generator while maintaining its inclined orientation in space in conjunction with its mounting in and removal from a plasma processing layout. This controlled movement of the plasma generator is achieved in that a change in the vertical position of a gripping arrangement 4 is automatically followed by a horizontal movement of the gripping arrangement.