| 摘要 |
PURPOSE:To automatically stop working when a device has become a desired working state, without any help from others, and also to realize the mass production, by working a quartz oscillator, detecting an electric signal containing a natural frequency generated in the course of working a piezoelectric element. CONSTITUTION:Polishing is performed by fitting a piezoelectric element into a chuck tool of a chuck means 41, holding it tightly, pressing it by making it contact with a spherical polishing pan formed on a conductive lapping pan 16, and driving rotating shafts 17, 37 and a conductive rocking body 8. The lapping pan 16 is electically connected to conductive frame bodies 2, 3, a lead wire 19 is drawn out and is made one terminal of a piezoelectic detecting terminal, also a bearing 34, rotating shufts 37, 40 and the chuck means 41 are connected electrically, a lead wire 48 is drawn out from the bearing 34 and is made the other terminal of the piezoelectic detecting terminal, an electric signal of a natural frequency of the piezoelectric element, which is generated when working the piezoelectric element is detected, and when the natural frequency has become a prescribed frequency, polishing is stopped. |
