Process for producing thin films, target for carrying out said process and process for producing said target

摘要

In view of the problem of producing thin films, for example ferroelectrics, in the desired material composition in a simple manner, it is proposed to produce a target in accordance with the drawing not made of metal oxides but of the metals themselves in a simple manner and to oxidise the metals during sputtering of the target so that reproducible, stoichiometrically correct thin films are produced without the exceptional use of aids. <IMAGE>