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发明名称
PATTERN FORMATION
摘要
申请公布号
JPS57130430(A)
申请公布日期
1982.08.12
申请号
JP19810016613
申请日期
1981.02.06
申请人
NIPPON DENSHIN DENWA KOSHA
发明人
YOSHIKAWA AKIRA;TAKEDA AKITSU;OCHI OSAMU;KUKI TOMOKO;MIZUSHIMA NOBUHIKO
分类号
H01L21/306;G03F7/00;H01L21/027;H01L21/266;H01L21/302;H01L21/3065;H01L21/314
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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