| 摘要 |
PURPOSE:To obtain a novel electrode fitted for a head for thermal facsimile by forming the same of a Cu layer and an Al-Cu complex layer and by reducing contact resistance to a heating resistor having large contact resistance to Al, as much as possible, to make thereby the contact excellent. CONSTITUTION:A glazed layer 2, for instance, is formed on the surface of a substrate 1 and thereon the heating resistor 3 of the thin film of alloy such as TaSi, TaN and Mosi is formed by spattering, evaporation or the like. Next, the Cu layer 11 forming a foundation in contact with the resistor 3 and the glazed layer 2 is formed by spattering, evaporation or the like. And further thereon the Al-Cu complex layer 12 containing Cu of 4-5%, for instance, is formed and made to constitute the electrode 13 by pattering. On ths surface thereof a protection film 5 is formed, preferably, of SiO2, Al2O3 or the like. |
