| 摘要 |
PURPOSE:To obtain an area flow meter which has improved precision for feedback control over a servo system, by providing an energizing coil which energizes a variable orifice and a detection coil which detects the extent of movement of the movable orifice. CONSTITUTION:A fixed orifice 12 is fitted in a tube 11 by supporting plates 14A and 14B which have couples of left and right rods 13A and 13B and flow holes 15A and 15B. On the internal wall of the tube 11, a movable orifice 16 which forms a throttle area with the fixed orifice 12 is provided movablly to left and right through the operation of a spring 17. Further, an energizing coil 18 which magnetizes the movable orifice 16 over the movement area of the movable orifice 16 and a detection coil which outputs a signal in accordance to the left/right movement extent of the movable orifice 16 are provided around the external wall of the tube 11. Consequently, the movable orifice 16 moves in accordance with the difference in pressure across the throttle part due to a difference in flow rate, so the quantity of flow is found from the extent of movement. |
