| 摘要 |
PURPOSE:To prevent respective layers from peeling off mutually, by using an organic material containing fine grains for an interlayer insulating layer. CONSTITUTION:On a nonmagnetic substrate 1a made of an Al2O3-TiC mixture, a lower magnetic layer 2a of Ni-Fe alloy is formed and on the layer 2a, a lower insulating layer 4a made of photoresist containing fine grains 9 with <=1mum grain size is formed by spin coating with a nonmagnetic layer 10a as a magnetic gap. Then, the lower insulating layer 4a is treated with plasma. On the lower insulating layer 4a, a conductive layer 3a forming a coil and an upper insulating layer 5a made of photoresist containing fine grains 8 with <=1mum grain size are formed and after their upper part is treated with plasma, an upper magnetic layer 6a made of Ni-Fe alloy is laminated to form a closed magnetic path; and a protective layer 7a of SiO2 is further formed to obtain a thin-film magnetic head. |
